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Updated: Jul 14, 2026

Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators
Published on: August 15, 2014
An experimental investigation of analog delay generation for dynamic control of microsensors and atomic force
1Oak Ridge National Laboratory, Bldg. 4500 S, MS 6123, Bethel Valley Road, Oak Ridge, TN 37831-6123, USA.
Abstract:
We present an implementation of pure-time-delay generation in analog signals located in the kilo-Hertz frequency band. The controlled constant delays that are produced engage in a feedback system to investigate the dynamic response of microcantilevers. Delayed systems offer a vast richness of eigenvalues resulting in the possibility of excitations at frequencies other than that of the fundamental mode. Different cantilever actuation and delay generation approaches are investigated and compared, and detailed experimental observation of the dynamic response of the system is presented. Based on our results, an acoustic excitation is devised that may be used as an efficient sensor.
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