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Updated: Jul 12, 2026

Using Synchrotron Radiation Microtomography to Investigate Multi-scale Three-dimensional Microelectronic Packages
Published on: April 13, 2016
An iterative algorithm for scanning tomographic acoustic microscopy
1Department of Electrical and Computer Engineering, University of California, Santa Barbara 93106.
Abstract:
Acoustic microscopy is capable of providing high-resolution images of small objects. When such a microscope operates in the transmission mode, it produces simply a shadow-graph of all the structures encountered by the acoustic wave passing through the object. The resultant images are difficult to comprehend because of diffraction and overlapping of complex structures. Scanning tomographic acoustic microscopy (STAM) overcomes these difficulties and produces unambiguous micrographs of objects of substantial thickness and complexity. STAM uses the back-and-forth propagation algorithm to reconstruct tomograms of various layers to be imaged. When these layers are physically close to one another, ambiguities appear in the reconstructed images. Using an iterative algorithm eliminates these ambiguities and resolves layers that are only two wavelengths apart.
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