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Shaping the Amplitude and Phase of Laser Beams by Using a Phase-only Spatial Light Modulator

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Analysis of systematic errors in spatial carrier phase shifting applied to interferogram intensity modulation

Adam Styk¹, Krzysztof Patorski

¹Institute of Micromechanics and Photonics, Warsaw University of Technology, Poland. a.styk@mchtr.pw.edu.pl

|July 5, 2007

Summary

This study introduces a simplified spatial carrier phase shifting interferometry method for decoding two-beam interferogram intensity modulation. The technique offers advantages in single-frame recording and data processing for analyzing vibrating microelements.

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Area of Science:

Optical Metrology
Interferometry
Micro-element Analysis

Background:

Traditional interferogram analysis can be complex and require specialized equipment.
Decoding intensity modulation in two-beam interferograms is crucial for precise measurements.
Systematic errors often complicate fringe pattern analysis.

Purpose of the Study:

To present a simplified method for two-beam interferogram intensity modulation decoding.
To analyze the impact of systematic errors on modulation distribution determination.
To identify an optimal calculation algorithm for fringe pattern analysis.

Main Methods:

Spatial carrier phase shifting interferometry for single-frame recording.
Automatic fringe pattern analysis techniques.
Numerical simulations and laboratory testing of vibrating silicon microelements.

Main Results:

Demonstrated the advantages of single-frame recording, experimental simplicity, and uncomplicated data processing.
Quantified the influence of spatial carrier miscalibration, nonuniform intensity profiles, and nonlinear recording.
Identified an optimal calculation algorithm through simulations and experimental validation.

Conclusions:

The proposed spatial carrier phase shifting interferometry method is effective for decoding intensity modulation.
The analysis provides insights into mitigating systematic errors for accurate fringe pattern analysis.
The method is validated for analyzing dynamic phenomena like vibrating silicon microelements.