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Development of a three-degree-of-freedom laser linear encoder for error measurement of a high precision stage

Hsueh-Liang Huang1, Chien-Hung Liu, Wen-Yuh Jywe

  • 1Department of Engineering Science, National Cheng-Kung University, Tainan, Taiwan 701, Republic of China.

The Review of Scientific Instruments
|July 7, 2007
PubMed

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