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Updated: Jul 13, 2026
High-resolution Thermal Micro-imaging Using Europium Chelate Luminescent Coatings
Published on: April 16, 2017
Laser scanning thermoreflectance imaging system using galvanometric mirrors for temperature measurements of
S Grauby1, A Salhi, J-M Rampnoux
1CPMOH-Université Bordeaux 1, 351 Cours de la Libération, 33405 Talence Cedex, France. stephane.grauby@u-bordeaux1.fr
Abstract:
We present a thermoreflectance imaging system using a focused laser sweeping the device under test with a scanner made of galvanometric mirrors. We first show that the spatial resolution of this setup is submicrometric, which makes it adapted to microelectronic thermal measurements. Then, we studied qualitative temperature variations on two dissipative structures constituted of thin (0.35 microm) dissipative resistors, the distance between two resistors being equal to 0.8 or 10 microm. This technique combines sensitivity and speed: it is faster than a point classical thermoreflectance technique and, in addition, more sensitive than a charge-coupled device thermoreflectance imaging technique.
