Related Experiment Video
Updated: Jul 13, 2026

3D Depth Profile Reconstruction of Segregated Impurities Using Secondary Ion Mass Spectrometry
Published on: April 29, 2020
Quality improvement of environmental secondary electron detector signal using helium gas in variable pressure
Eisaku Oho1, Kazuhiko Suzuki, Sadao Yamazaki
1Department of Electrical Engineering, Kogakuin University, Tokyo, Japan. oho@cc.kogakuin.ac.jp
Abstract:
The quality of the image signal obtained from the environmental secondary electron detector (ESED) employed in a variable pressure (VP) SEM can be dramatically improved by using helium gas. The signal-to-noise ratio (SNR) increases gradually in the range of the pressures that can be used in our modified SEM. This method is especially useful in low-voltage VP SEM as well as in a variety of SEM operating conditions, because helium gas can more or less maintain the amount of unscattered primary electrons. In order to measure the SNR precisely, a digital scan generator system for obtaining two images with identical views is employed as a precondition.
Related Concept Videos
Scanning Electron Microscopy
Fundamental Principles
Accelerated...
Preparation of Samples for Electron Microscopy
Overview of Electron Microscopy

