You might also read
Related Articles
Articles linked to this work by shared authors, journal, and citation graph.
You might also read
Articles linked to this work by shared authors, journal, and citation graph.
Updated: Jul 13, 2026

Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators
Published on: August 15, 2014
1Department of Mechanical and Computer-Aided Engineering, Graduate School of Automation and Mechatronics, St. John's University, 499 Sec. 4 Tam King Road, Tamsui, Taipei 25135, Taiwan. ericwen@mail.sju.edu.tw
A new single-axis ultrasonic actuating stage offers precise positioning and high performance. Its simple, cost-effective design utilizes an ultrasonic actuator and neural-fuzzy control for flexible applications.
Area of Science:
Background:
Purpose of the Study:
Main Methods:
Main Results:
Conclusions: