Analysis of a spatially dispersive displacement sensor utilizing an AlGaInP chip

Ji-Bin Horng1, Jay Liao, Yao-Jun Tsai

  • 1Laser Application Technology Center, Industrial Technology Reasearch Institute, Number 8, Gongyan Road, Liujia Shiang, Tainan County 734, Taiwan.

Applied Optics
|August 23, 2007
PubMed
Summary

This study introduces a novel spatially dispersive displacement sensor for precise measurement. The sensor achieves a ~10 micrometer range with 25 nanometer resolution, offering a simple displacement measurement solution.

Related Concept Videos