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Related Experiment Video

Updated: Jul 12, 2026

Atomic Layer Deposition of Vanadium Dioxide and a Temperature-dependent Optical Model
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Polycrystalline CVD Diamond Films with High Electrical Mobility.

M A Plano, M I Landstrass, L S Pan

    Science (New York, N.Y.)
    |May 28, 1993
    PubMed
    Summary

    Chemical vapor deposition (CVD) diamond films now rival natural diamonds in electronic properties. Advances in deposition enable CVD diamond with high carrier mobility and lifetimes, approaching natural IIa diamond quality.

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    Area of Science:

    • Materials Science
    • Solid State Physics
    • Semiconductor Technology

    Background:

    • Polycrystalline diamond films are increasingly important for electronic applications.
    • Chemical vapor deposition (CVD) is a key technique for producing these films.
    • Achieving electronic properties comparable to natural diamonds has been a long-standing goal.

    Purpose of the Study:

    • To evaluate the electronic properties of polycrystalline diamond films produced by advanced CVD processes.
    • To compare the performance of CVD diamond with high-quality natural IIa diamonds.
    • To investigate the factors influencing the electrical quality of CVD diamond films.

    Main Methods:

    • Transient photoconductivity measurements were used to determine carrier mobility and lifetimes.

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  • Electrical properties were measured at low carrier densities and varying electric fields.
  • Raman spectroscopy was employed to analyze the crystalline quality of the diamond films.

    • Main Results:

    • CVD diamond films exhibit a combined electron-hole mobility of 4000 cm²/Vs at 200 V/cm, comparable to natural IIa diamonds.
    • Carrier lifetimes for CVD diamond are 150 ps, while natural diamonds show 300 ps.
    • Collection distances approach those of natural diamonds, with no observed detrimental grain boundary effects.

    Conclusions:

    • Advanced CVD processes yield polycrystalline diamond films with electronic properties rivaling natural IIa diamonds.
    • The electrical quality of CVD diamond correlates with the diamond Raman peak width.
    • Grain boundaries do not appear to limit the performance of state-of-the-art CVD diamond films.