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Updated: Jul 12, 2026

Theoretical Calculation and Experimental Verification for Dislocation Reduction in Germanium Epitaxial Layers with Semicylindrical Voids on Silicon
06:57

Theoretical Calculation and Experimental Verification for Dislocation Reduction in Germanium Epitaxial Layers with Semicylindrical Voids on Silicon

Published on: July 17, 2020

Epitaxial growth and the art of computer simulations

H Metiu, Y T Lu, Z Zhang

    Science (New York, N.Y.)
    |February 28, 1992
    PubMed

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