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Characterization of Surface Modifications by White Light Interferometry: Applications in Ion Sputtering, Laser Ablation, and Tribology Experiments
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Wavefront measurement interferometry at the operational wavelength of extreme-ultraviolet lithography

Yucong Zhu1, Katsumi Sugisaki, Masashi Okada

  • 1EUVA Sagamihara R&D Center, 1-10-1 Asamizodai, Sagamihara, Kanagawa 228-0828, Japan. zhu.yucong@nikon.co.jp

Applied Optics
|September 21, 2007
PubMed

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