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A lithographically-patterned, elastic multi-electrode array for surface stimulation of the spinal cord.

Kathleen W Meacham¹, Richard J Giuly, Liang Guo

¹Wallace H. Coulter Department of Biomedical Engineering, Georgia Institute of Technology and Emory University, 313 Ferst Drive, Atlanta, GA 30332, USA.

Biomedical Microdevices

|October 5, 2007

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A novel microfabrication process yields scalable, elastic multi-electrode arrays (MEAs) from silicone. These flexible neural interfaces feature small electrodes and stretchable traces, demonstrating selective stimulation of neural tissue.

Area of Science:

Materials Science and Engineering
Neuroscience
Biomedical Engineering

Background:

Development of advanced neural interfaces is crucial for understanding and treating neurological disorders.
Existing multi-electrode arrays (MEAs) often lack the flexibility and scalability required for optimal neural tissue interfacing.

Purpose of the Study:

To present a new, scalable microfabrication process for silicone-based, elastic multi-electrode arrays (MEAs).
To demonstrate the capability of these MEAs for selective neural stimulation.

Main Methods:

Fabrication involves spinning poly(dimethylsiloxane) (PDMS) layers, depositing and patterning gold for electrodes and wires.
A custom reactive ion etch (RIE) process is used for micropatterning PDMS while preserving the gold thin film.

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Incorporation and testing of stretchable serpentine traces for enhanced flexibility.

Main Results:

Successfully fabricated elastic MEAs with small electrode areas (60 microm diameter).
Demonstrated selective stimulation of an in vitro isolated juvenile rat spinal cord.
Validated the functionality of stretchable serpentine traces within the MEA.

Conclusions:

The presented microfabrication process enables scalable production of high-performance, elastic MEAs.
These MEAs offer conformal interfacing with neural tissue and selective stimulation capabilities.
The developed technology holds promise for advanced neuroprosthetics and neural recording applications.