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Updated: Jul 11, 2026

Fabrication of Low Temperature Carbon Nanotube Vertical Interconnects Compatible with Semiconductor Technology
Published on: December 7, 2015
Tribological properties of densely packed vertically aligned carbon nanotube film on SiC formed by surface
Koji Miyake1, Michiko Kusunoki, Hatsuhiko Usami
1Advanced Manufacturing Research Institute, National Institute of Advanced Industrial Science and Technology, 1-2-1 Namiki, Tsukuba, Ibaraki 305-8564, Japan. koji-miyake@aist.go.jp
Abstract:
Characteristic tribological properties, such as nonlinearity of the friction force-normal load curve, high coefficient of friction, and good wear-resistant performance were observed on densely packed, vertically aligned carbon nanotubes (CNTs) with different diameters and lengths using atomic force microscopy. Shorter and thicker CNTs were found to have higher coefficients of friction. The observed properties were attributed to the nonlinear elastic property of the CNTs caused by buckling.

