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Atomic Force Microscopy

Atomic Force Microscopy

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Related Experiment Video

Updated: Jun 29, 2026

Characterization of Surface Modifications by White Light Interferometry: Applications in Ion Sputtering, Laser Ablation, and Tribology Experiments

Characterization of Surface Modifications by White Light Interferometry: Applications in Ion Sputtering, Laser Ablation, and Tribology Experiments

Published on: February 27, 2013

Multiperiod fringe projection interferometry using a backpropagation method for surface profile measurement.

Hai Huan¹, Osami Sasaki, Takamasa Suzuki

¹Graduate School of Science and Technology, Niigata University, Niigata-shi 950-2181, Japan. haihuan@gmail.com

|October 13, 2007

Summary

This summary is machine-generated.

This study introduces a novel optical method for precise surface measurement. It accurately maps object surfaces, even with significant discontinuities, using phase-based fringe analysis and backpropagation.

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Area of Science:

Optics and Photonics
Metrology

Background:

Accurate surface profiling is crucial for various scientific and industrial applications.
Existing methods may struggle with surfaces exhibiting discontinuities.

Purpose of the Study:

To develop a high-accuracy optical measurement technique for object surfaces.
To enable precise measurement of surfaces with discontinuities.

Main Methods:

Projecting interference fringes of varying periods onto the object surface.
Maintaining a constant phase point while scanning fringe periods.
Generating multiple optical fields from detected fringe phases.
Backpropagating optical fields to a common phase point for signal summation.
Utilizing backpropagation distance to determine object surface position.

Main Results:

Successfully created multiple optical fields with different fringe periods.
Achieved maximum amplitude summation of backpropagated fields at the constant phase point.
Demonstrated accurate measurement of object surfaces with millimeter-scale discontinuities.
Attained high-accuracy measurements in the micrometer range.

Conclusions:

The proposed method offers a robust solution for accurate surface metrology.
It effectively handles complex surfaces with significant height variations.
High precision in micrometer range is achievable for discontinuity measurement.