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Fabrication and Characterization of Thickness Mode Piezoelectric Devices for Atomization and Acoustofluidics
Published on: August 5, 2020
Analysis of temperature compensation in a plate thickness mode bulk acoustic wave resonator
Huan Xue1, Yuantai Hu, Qing-Ming Wang
1Department of Mechanics, School of Civil Engineering and Mechanics, Huazhong University of Science and Technology, Wuhan 430074, China.
Abstract:
We analyze temperature-induced frequency shift in a thickness mode bulk acoustic wave resonator with a layer of another material for temperature compensation. The perturbation integral by Tiersten is used to calculate frequency shifts in the resonator under a temperature change. It is shown that, with a proper design of the compensation layer, temperature sensitivity of the resonator can be reduced or made zero.
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