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A parylene-silicon cochlear electrode array with integrated position sensors.

Jianbai Wang1, Mayurachat N Gulari, Kensall D Wise

  • 1Dept. of Electr. Eng. & Comput. Sci., Michigan Univ., Ann Arbor, MI 48109, USA. jianbaiw@umich.edu

Conference Proceedings : ... Annual International Conference of the IEEE Engineering in Medicine and Biology Society. IEEE Engineering in Medicine and Biology Society. Annual Conference
|October 20, 2007
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A novel thin-film cochlear electrode array was developed for cochlear prostheses, enhancing sound perception and accuracy. This advanced device integrates sensors and adjustable stiffness for better modiolar wall adherence.

Area of Science:

  • Biomedical Engineering
  • Materials Science
  • Neurosurgery

Background:

  • Cochlear implants aim to restore hearing by stimulating the auditory nerve.
  • Existing electrode arrays face challenges in precise insertion and long-term stability.
  • Improving electrode design is crucial for enhanced audiological outcomes.

Purpose of the Study:

  • To develop a thin-film cochlear electrode array for improved cochlear prosthesis performance.
  • To achieve greater accuracy in electrode positioning within the cochlea.
  • To enhance sound perception for individuals with hearing loss.

Main Methods:

  • Fabrication using bulk-silicon micromachining with parylene deposition and patterning.
  • Wafer-level processing followed by wet silicon release etch utilizing boron etch-stops.

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  • Integration of built-in tip and curvature sensors for real-time feedback.

    • Main Results:

    • The process enables arrays with pre-stressed substrates for modiolar wall adherence.
    • Adjustable stiffness allows for optimized mechanical properties across a wide range.
    • In vitro and in vivo tests confirmed sensor functionality during implantation.

    Conclusions:

    • The developed thin-film electrode array offers a promising platform for advanced cochlear prostheses.
    • The fabrication process allows for precise control over array geometry and mechanical properties.
    • Integrated sensing capabilities provide valuable data for surgical placement and device performance.