Laser output power stabilization for direct laser writing system by using an acousto-optic modulator

Dong Ik Kim1, Hyug-Gyo Rhee, Jae-Bong Song

  • 1Space Optics Research Center, Korea Research Institute of Standards and Science, 1 Doryong-Dong, Yuseong-Gu, Daejeon 305-340, Republic of Korea.

Summary

We stabilized Ar(+) laser output power for direct laser writing systems, significantly reducing fluctuations. This power stabilization improves the fabrication of diffractive optical elements and computer-generated holograms.

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