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Laser output power stabilization for direct laser writing system by using an acousto-optic modulator
Dong Ik Kim1, Hyug-Gyo Rhee, Jae-Bong Song
1Space Optics Research Center, Korea Research Institute of Standards and Science, 1 Doryong-Dong, Yuseong-Gu, Daejeon 305-340, Republic of Korea.
The Review of Scientific Instruments
|November 6, 2007
Summary
We stabilized Ar(+) laser output power for direct laser writing systems, significantly reducing fluctuations. This power stabilization improves the fabrication of diffractive optical elements and computer-generated holograms.
Area of Science:
- Optics and Photonics
- Laser Technology
- Optical Engineering
Background:
- Laser output power instability in direct laser writing systems causes resolution fluctuations.
- Fabrication of diffractive optical elements and computer-generated holograms requires stable laser power.
- Existing laser systems may suffer from power fluctuations affecting precision applications.
Purpose of the Study:
- To stabilize the output power of an Argon-ion (Ar(+)) laser for a direct laser writing system (LWS).
- To investigate the effectiveness of a feedback control system in reducing laser power fluctuations.
- To demonstrate the applicability of the developed stabilization system to other laser types, such as He-Ne lasers.
Main Methods:
- Implemented a feedback loop incorporating an acousto-optic modulator, a photodetector, and a servo controller.
- Utilized an Ar(+) laser as the primary light source for the direct laser writing system.
- Tested the system's performance over extended periods and applied it to a 2 mW internal mirror He-Ne laser.
Main Results:
- Achieved output power stability of +/-0.20% for 12 minutes with the Ar(+) laser.
- Attained a relative intensity noise level of 2.1 x 10(-7) Hz(-12) at 100 Hz.
- Demonstrated improved output power stability of +/-0.12% for 25 minutes with a He-Ne laser.
Conclusions:
- The developed feedback system effectively stabilizes laser output power for direct laser writing applications.
- The power stabilization technique enhances the resolution and quality of fabricated diffractive optical elements and computer-generated holograms.
- The system is adaptable and successful in stabilizing power for different laser types, broadening its potential use.

