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Overview: recent progress in three-dimensional atom probe instruments and applications.

Alfred Cerezo¹, Peter H Clifton, Sergio Lozano-Perez

¹Department of Materials, University of Oxford, Parks Road, Oxford OX1 3PH, UK. alfred.cerezo@materials.ox.ac.uk

Microscopy and Microanalysis : the Official Journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada

|November 16, 2007

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Recent advancements in three-dimensional atom probe (3DAP) analysis, including novel instrument designs and laser pulsing, enhance materials characterization. These improvements expand the scope of 3DAP for complex materials science challenges.

Area of Science:

Materials Science
Analytical Chemistry
Physics

Background:

Three-dimensional atom probe (3DAP) analysis has seen significant technical evolution.
Various instrument designs reflect different technical compromises and performance goals.

Purpose of the Study:

To review recent developments in 3DAP technology.
To highlight improvements in instrument performance and capabilities.

Main Methods:

Review of technical compromises leading to diverse 3DAP instrument designs.
Description of a novel reflectron configuration for enhanced performance.
Integration of laser pulsing and focused ion-beam (FIB) specimen preparation.

Main Results:

Related Experiment Videos

A new 3DAP instrument with a novel reflectron configuration offers a large field of view and high mass resolution.

Laser pulsing and advanced specimen preparation broaden the applicability of 3DAP.

Successful application in analyzing semiconductor materials and devices.

Conclusions:

Modern 3DAP techniques provide enhanced capabilities for materials analysis.
The described instrument design and methods represent a significant step forward in 3DAP performance.
3DAP is increasingly valuable for addressing complex materials science problems, particularly in semiconductors.