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Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators
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Design considerations of Miller oscillators for high-sensitivity QCM sensors in damping media

Loreto Rodriguez-Pardo1, Jose Fariña, Claude Gabrielli

  • 1Departamento de Tecnología Electrónica and the Instituto de Electronica Aplicada Pedro Barrié de la Maza, Universidad de Vigo, 36200, Spain. lpardo@uvigo.es

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
|November 21, 2007
PubMed

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