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FEM/BEM for simulation of LSAW devices
1Institute of Semiconductor Physics, Siberian Branch of the Russian Academy of Science, Novosibirsk 630090, Russia. taziev@thermo.isp.nsc.ru
IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
|November 21, 2007
Summary
This study models acoustic wave propagation in piezoelectrics using a combined matrix Green
Area of Science:
- Materials Science
- Acoustics
- Solid State Physics
Background:
- Piezoelectric materials are crucial for acoustic wave devices.
- Modeling acoustic wave propagation in structures with electrodes is complex.
- Existing methods may lack speed or accuracy for detailed simulations.
Purpose of the Study:
- To develop an efficient and accurate computational method for modeling acoustic wave propagation.
- To simulate surface acoustic, leaky acoustic, and surface skimming bulk waves.
- To analyze wave propagation in piezoelectrics with finite metallic electrode arrays.
Main Methods:
- Combined matrix Green's function and finite element method (FEM).
- Optimized computation of Green's function components.
- Combined trapezoidal and Filon's integration for Fourier transformations.
- Galerkin method to determine unknown coefficients for elastic fields.
Main Results:
- Accurate simulation of acoustic wave propagation in piezoelectric structures.
- Significant speed optimization in computational methods.
- Good agreement between numerical simulations and experimental data.
- Effective modeling of surface acoustic, leaky acoustic, and surface skimming bulk waves.
Conclusions:
- The combined matrix Green's function and FEM approach is effective for simulating acoustic waves.
- The proposed method enhances computational speed and accuracy.
- Validated by experimental results on lithium niobate and lithium tantalate transducers.
