Microscopic tomography with ultra-HVEM and applications.

Akio Takaoka1, Toshiaki Hasegawa, Kiyokazu Yoshida

  • 1Research Center for Ultra-HVEM, Osaka University, Mihogaoka 7-1, Ibaraki, Osaka, Japan. takaoka@uhvem.osaka-u.ac.jp

Ultramicroscopy
|November 27, 2007
PubMed
Summary

The 3 MV ultra-high voltage electron microscope (UHVEM) enables high-resolution 3D imaging of thick biological and silicon device samples. This advanced electron tomography technique offers significant improvements for various scientific fields.

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