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Updated: Jul 9, 2026

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Published on: May 9, 2021
A stator for a self-running, ultrasonically-levitated sliding stage
Daisuke Koyama1, Kentaro Nakamura, Sadayuki Ueha
1Precision and Intelligence Laboratory, Tokyo Institute of Technology, Yokohama, Japan. dkoyama@sonic.pi.titech.ac.jp
Researchers developed a self-levitating stage using ultrasonic waves. This novel acoustic levitation system demonstrates controlled movement, paving the way for advanced micro-manipulation technologies.
Area of Science:
- Acoustics
- Mechanical Engineering
- Materials Science
Background:
- Acoustic levitation utilizes acoustic radiation forces to suspend objects.
- Controlling levitation and propulsion requires precise manipulation of acoustic waves.
Purpose of the Study:
- To propose and investigate a self-running, ultrasonically-levitated sliding stage.
- To analyze the levitation and propulsion characteristics of the stator.
- To optimize stator design for enhanced performance.
Main Methods:
- Finite-element analysis (FEA) for stator size optimization.
- Excitation of flexural standing and traveling waves using piezoelectric transducers (PZT).
- Experimental measurement of levitation distance and propulsion direction.
Main Results:
- Stator levitation achieved at frequencies close to FEA predictions (23.2 and 96.1 kHz).
- Levitation distance found to be proportional to beam vibration displacement amplitude.
- Controlled propulsion in opposite directions achieved by manipulating traveling wave phase differences.
Conclusions:
- The proposed ultrasonically-levitated sliding stage is feasible and effective.
- FEA is a valuable tool for optimizing acoustic levitation devices.
- Precise control over acoustic waves enables versatile motion control for levitated objects.
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