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Design and Development of a Three-Dimensionally Printed Microscope Mask Alignment Adapter for the Fabrication of Multilayer Microfluidic Devices
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Effective formation method for an aspherical microlens array based on an aperiodic moving mask during exposure.

Lifang Shi1, Chunlei Du, Xiaochun Dong

  • 1State Key Laboratory of Optical Technologies for Microfabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, Sichuan Province, China 610209.

Applied Optics
|December 7, 2007
PubMed
Summary

A new method designs aperiodic masks for fabricating aspherical microlens arrays. This technique enables efficient, single-exposure production of infrared microlens arrays with high accuracy.

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Area of Science:

  • Optics and Photonics
  • Materials Science
  • Microfabrication

Background:

  • Microlens arrays are crucial for optical systems.
  • Fabricating aspherical profiles with high precision remains challenging.
  • Existing methods may require multiple exposure steps.

Purpose of the Study:

  • To propose an aperiodic mask design method for fabricating microlens arrays with aspherical profiles.
  • To address the nonlinear relationship between exposure doses and lens profiles.
  • To enable efficient, single-exposure fabrication of complex microlens structures.

Main Methods:

  • Developed an aperiodic mask design approach considering nonlinear exposure dose-profile relationships.
  • Defined criteria for quantization interval and fabrication range.
  • Constructed a mask function for a quadrangle microlens array with a hyperboloid profile.
  • Utilized reactive ion etching to transfer the mask pattern to germanium substrates.

Main Results:

  • Successfully designed and fabricated a microlens array mask in a single exposure process.
  • Achieved a surface roughness of less than 10 nm (peak-to-valley).
  • Demonstrated a profile error of less than 40 nm (root mean square).

Conclusions:

  • The proposed aperiodic mask design method is effective for fabricating high-precision aspherical microlens arrays.
  • The method allows for efficient, one-time exposure fabrication.
  • The results show excellent surface quality and profile accuracy for infrared applications.