Related Experiment Video
Updated: Jul 9, 2026

Tools for Surface Treatment of Silicon Planar Intracortical Microelectrodes
Published on: June 8, 2022
Arrays of silicon microdischarge devices with multicomponent dielectrics
Abstract:
Arrays as large as 15x15 of microdischarge devices having inverted pyramidal silicon cathodes (50mumx50mum) and SiO(2)- Si(3)N(4)- polymer composite dielectrics have been fabricated and characterized with Ne gas. The lifetimes, reliability, and ignition characteristics of the arrays are superior to those of earlier designs having a single polymer dielectric. Operating voltages as low as 150 V for a 10x10 pixel array and 1000 Torr of Ne have been measured. Single (50mumx50mum) pyramidal cathode devices operate at voltages as low as 113 V when the Ne pressure is 900 Torr.
Related Concept Videos
Capacitor With A Dielectric
Dielectrics are non-conducting materials with no free or loosely bound electrons. When a dielectric is...
MOS Capacitor
The metal gate is typically made from highly conductive materials such as aluminum or polysilicon. Beneath the metal gate lies a thin layer of...
Schottky Barrier Diode
Electrostatic Boundary Conditions in Dielectrics
Consider a case where both the mediums across a boundary are two different dielectric materials. Recall that the electric field and electric displacement are proportional and related through the material's permittivity.
Dielectric Polarization in a Capacitor

