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Updated: Jul 9, 2026

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
Published on: February 4, 2018
Broadband monolithic acousto-optic tunable filter
Abstract:
Broadband monolithic acousto-optic tunable filters that combine a piezoelectric transducer array and an acousto-optic interaction medium in a single crystal have been investigated. A linearly chirped acoustic superlattice with an optical tuning range of lambda = 1.3-1.6 mum was formed by domain inversion in LiNbO(3) . X-propagating longitudinal acoustic waves are excited in a crossed-field scheme by a rf E(y) field applied to the superlattice and couple collinearly propagating e- and o-polarized optical modes. At mu = 1.319 mum and mu = 1.55 mum the spectral bandwidths (FWHM) were 1.54 and 2.3 nm, respectively. A relative conversion efficiency of 43%/W and a maximum conversion efficiency of 51% were measured at 1.319 mum.
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