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Scanning Michelson interferometer for imaging surface acoustic wave fields.

J V Knuuttila, P T Tikka, M M Salomaa

|December 8, 2007

Summary

This summary is machine-generated.

This study introduces a scanning homodyne Michelson interferometer for imaging surface acoustic wave (SAW) fields. The noninvasive optical system achieves high resolution and speed, offering new insights into SAW device behavior.

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Area of Science:

Physics
Materials Science
Electrical Engineering

Background:

Surface Acoustic Wave (SAW) devices are crucial in modern electronics.
Accurate characterization of SAW fields is essential for device optimization.
Existing measurement techniques may have limitations in resolution or invasiveness.

Purpose of the Study:

To develop a novel scanning homodyne Michelson interferometer for high-frequency SAW field imaging.
To achieve noninvasive, high-resolution, and high-speed measurement of SAW fields.
To provide a tool for advancing SAW device research and development.

Main Methods:

Construction of a scanning homodyne Michelson interferometer.
Utilizing optical scanning for noninvasive surface measurement.
Implementing a fast scheme for locating the interferometer's optimum operation point.

Main Results:

Achieved sensitivity of approximately 10(-5)nm/ radicalHz.
Capable of measuring SAW frequencies from 0.5 MHz to 1 GHz.
Demonstrated lateral resolution better than 1 µm and measuring speeds up to 50,000 points/h.

Conclusions:

The developed interferometer offers a powerful noninvasive method for visualizing SAW field distribution.
Provides critical information beyond electrical measurements for SAW device analysis.
Enables enhanced development and research in SAW device technology.