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Updated: Jul 9, 2026

Tracking Infiltration Front Depth Using Time-lapse Multi-offset Gathers Collected with Array Antenna Ground Penetrating Radar
Published on: May 1, 2018
Measurement of trench depth by infrared interferometry
Abstract:
Measurement and control of high-aspect-ratio structures such as dynamic random-access memory trenches is an important step in the manufacture of modern memory devices. We present a novel technique based on infrared interferometry that has been implemented in manufacturing and is capable of measuring sub- 0.25-mum -wide and 10-mum -deep trenches nondestructively and with an accuracy of better than 0.1mum .
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