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Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Three-dimensional microscopy with phase-shifting digital holography
1Graduate Course of Science and Engineering, Saitama University, Urawa, Saitama 338-8570, Japan.
Abstract:
We applied phase-shifting digital holography to microscopy by deriving the complex amplitude of light scattered from microscopic three-dimensional objects through a microscope objective by video camera recording, phase-shifting analysis, and computer reconstruction. This method requires no mechanical movement and provides a flexible display and quantitative evaluation of the reconstructed images. A theory of image formation and experimental verification with specimens are described.
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