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Mechano-optical waveguide on-off intensity modulator.

G J Veldhuis1, C Gui, T Nauta

  • 1MESA Research Institute, University of Twente, P.O. Box 217, NL-7500-AE Enschede, The Netherlands.

Optics Letters
|December 20, 2007
PubMed
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We developed a silicon oxynitride (SiON) waveguide modulator for optical sensors. This device achieves high extinction ratios (>37 dB) using electrostatic actuation, enabling efficient channel selection in sensor arrays.

Area of Science:

  • Photonics and Optical Engineering
  • Integrated Optics
  • Sensor Technology

Background:

  • High-extinction on-off modulators are critical for channel selection in integrated-optical sensor arrays.
  • Existing modulators may face limitations in performance or fabrication scalability.

Purpose of the Study:

  • To report a novel electrostatically driven, integrated mechano-optical waveguide on-off intensity modulator.
  • To demonstrate its performance using standard silicon oxynitride (SiON) technology.

Main Methods:

  • Fabrication of a mechano-optical waveguide modulator using SiON technology.
  • Utilizing electrostatic actuation to move an absorbing element into/out of the guided mode's evanescent field.
  • Employing chemical mechanical polishing and aligned wafer bonding for wafer-scale fabrication.

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Main Results:

  • Achieved an extinction ratio exceeding 37 dB.
  • Required an actuation voltage below 30 V.
  • Demonstrated the device in a 6 mm x 4 mm footprint at a wavelength of 632.8 nm.
  • Confirmed suitability for full wafer-scale fabrication.

Conclusions:

  • The developed SiON-based modulator offers high extinction and low actuation voltage.
  • The fabrication methods enable scalable, wafer-level production.
  • This technology is suitable for advanced integrated-optical sensor arrays.