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Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Grazing holographic projection of object-adapted fringes for shape measurements with enhanced sensitivity
Abstract:
A new method of fringe projection for shape measurement is presented. We use a combination of object-adapted fringes and holographic grazing projection to determine shape deviations of a turbine blade. If the shape of a test object is correct, a fringe grid with constant period is detected by the camera. The object-adapted fringes are projected coherently onto the master object, and a hologram is taken. If the hologram is reconstructed, grazing incidence of object-adapted fringes can be realized. Grazing holographic projection allows for higher triangulation angles and therefore increased sensitivity. Even small shape deviations can be detected and quantitatively evaluated with fast algorithms. The method can be extended to multiple exposed holograms to examine deep objects.

