Topometry for locally changing materials

Three-dimensional topometry is supplemented with ellipsometric measurements on the same pixel raster for calculation of the phase of the reflected waves and correction of the height fields. Lateral resolution is <1mum . The ellipsometric angles are determined by phase shifting and contrast evaluation. Three-dimensional fields of the ellipsometric angles, the real and the imaginary parts of the refractive index, and the corrected topography of the heights are presented.