Transmission Electron Microscopy
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Scanning Electron Microscopy
Electron Microscope Tomography and Single-particle Reconstruction
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Updated: Jul 9, 2026

Quantitative Atomic-Site Analysis of Functional Dopants/Point Defects in Crystalline Materials by Electron-Channeling-Enhanced Microanalysis
Published on: May 10, 2021
Dorin Geiger1, Hannes Lichte, Martin Linck
1Institute for Structure Physics, Triebenberg Laboratory, Technische Universität Dresden, D-01062 Dresden, Germany. Dorin.Geiger@Triebenberg.de
Cs-corrected transmission electron microscopy (TEM) combined with off-axis electron holography significantly enhances atomic-scale imaging. This powerful combination overcomes limitations of conventional methods, enabling complete object wave reconstruction and detailed analysis.
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