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Effects of tilt on high-resolution ADF-STEM imaging
S E Maccagnano-Zacher1, K A Mkhoyan, E J Kirkland
1School of Applied and Engineering Physics, Cornell University, Ithaca, NY 14853, USA.
Ultramicroscopy
|December 28, 2007
Summary
Specimen tilt significantly reduces image contrast in scanning transmission electron microscopy (STEM). Even a 1-degree tilt can halve image contrast, an effect amplified by specimen thickness and mitigated by low-angle detectors.
Area of Science:
- Materials Science
- Electron Microscopy
- Nanotechnology
Background:
- High-resolution imaging in scanning transmission electron microscopy (STEM) is crucial for nanoscale analysis.
- Specimen tilt can introduce artifacts in high-resolution annular dark-field (HAADF) images.
- Aberration correction in STEM probes aims to improve image quality and resolution.
Purpose of the Study:
- To investigate the impact of small-angle specimen tilt on HAADF images in STEM.
- To evaluate the effect of tilt on both uncorrected and aberration-corrected STEM probes.
- To explore the potential of low-angle annular dark-field detectors for tilt correction.
Main Methods:
- Multislice simulations were employed to model the effects of specimen tilt.
- Simulations were performed for scanning transmission electron microscopes with uncorrected and aberration-corrected probes.
- Analysis included various crystal orientations and specimen thicknesses.
Main Results:
- A specimen tilt of approximately 1 degree can lead to a twofold reduction in HAADF image contrast.
- The contrast reduction effect is consistent across different crystal orientations.
- Increasing specimen thickness exacerbates the contrast reduction caused by tilting.
- Simulations with low-angle annular dark-field detectors revealed more pronounced tilt effects.
Conclusions:
- Small-angle specimen tilts significantly degrade image contrast in high-resolution STEM imaging.
- Specimen tilt effects are dependent on tilt angle, crystal orientation, and specimen thickness.
- Low-angle annular dark-field detectors show promise for correcting specimen tilt artifacts during STEM operation.
