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Updated: Jul 8, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
10:28

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization

Published on: July 5, 2016

Double-exposure heterodyne imaging for observing line-of-sight deformation

D G Voelz, L McMackin, J K Boger

    Optics Letters
    |July 1, 1997
    PubMed

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