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Diffractive structures holographically recorded in amorphous hydrogenated carbon (a-C:H) films.

C R Lima, L L Soares, L Cescato

|January 12, 2008

Summary

We demonstrate submicrometer relief gratings in amorphous hydrogenated carbon (a-C:H) films using reactive ion etching (RIE). These gratings are suitable for infrared diffractive optical components due to the film

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Area of Science:

Materials Science
Optics
Nanotechnology

Background:

Amorphous hydrogenated carbon (a-C:H) films possess a high refractive index and transparency in the infrared (IR) spectrum.
Diffractive optical components require precise micro- and nanostructures for light manipulation.

Purpose of the Study:

To develop and demonstrate a method for directly recording submicrometer relief gratings in a-C:H films.
To evaluate the potential of these gratings as infrared (IR) diffractive optical components.

Main Methods:

Holographic recording of grating patterns in photoresist.
Transfer of patterns to a thin aluminum layer serving as a mask.
Reactive ion etching (RIE) of a-C:H films using the aluminum mask to create submicrometer relief gratings.

Main Results:

Successfully fabricated submicrometer relief gratings in a-C:H films.
Demonstrated the feasibility of using these gratings as diffractive optical components through diffraction measurements.

Conclusions:

The direct recording of submicrometer relief gratings in a-C:H films via RIE is a viable technique.
These a-C:H based gratings show promise for applications in IR-transmission diffractive optics.