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Updated: Jul 8, 2026
Atomic Layer Deposition of Vanadium Dioxide and a Temperature-dependent Optical Model
Published on: May 23, 2018
Preparation of VO2 thin film and its direct optical bit recording characteristics
M Fukuma1, S Zembutsu, S Miyazawa
1NTT Public Corporation, Musashino Electrical Communication Laboratory, 3-9-11 Midoricho, Musashino-shi, Tokyo 180, Japan.
Abstract:
Vanadium dioxide (VO2) film which has nearly the same transition point as single crystal has been obtained by reactive evaporation of vanadium on glass and subsequent annealing in N2 gas. Relations between optical properties of V02 film and its preparation conditions are presented. We made optical direct bit recording on V02 film using a laser diode as the light source. The threshold recording energy and bit density are 2 mJ/cm 2 and 350 bits/mm, respectively. We also made tungsten doping to lower the V02 film transition temperature.
