Updated: Jul 8, 2026

Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station
Published on: April 1, 2020
1Utsunomiya University, Faculty of Engineering, Utsunomiya 321, Japan.
This study introduces a novel angular displacement measurement method using photodiode arrays and cylindrical mirrors. The technique significantly reduces measurement errors, even with rotation axis inclination.
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