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Updated: Jul 7, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
10:28

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization

Published on: July 5, 2016

High precision deformation measurement by digital phase shifting holographic interferometry

M W Chang, C P Hu, P Lam

    Applied Optics
    |November 15, 1985
    PubMed
    Summary

    No abstract available in PubMed .

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