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Roughness measurement using a shearing interference microscope.

M Adachi1, K Yasaka

  • 1Industrial Research Institute of Hyogo Prefecture, 3-1-12 Yukihira-cho, Suma-ku, Kobe-shi 654, Japan.

Applied Optics
|March 1, 1986
PubMed
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This study introduces a new method for measuring surface roughness using shearing interference microscopy. The technique accurately quantizes root-mean-square (rms) roughness for precision-finished surfaces.

Area of Science:

  • Optical Metrology
  • Surface Science
  • Microscopy

Background:

  • Shearing interference microscopes offer high image stability, crucial for precise measurements.
  • Accurate measurement of surface roughness is vital in precision engineering and materials science.

Purpose of the Study:

  • To propose and validate a novel method for measuring the root-mean-square (rms) roughness of smooth surfaces.
  • To leverage the characteristics of shearing interference microscope images for quantitative roughness analysis.

Main Methods:

  • Utilizing shearing interference microscopy to capture images of smooth surfaces with interference fringes.
  • Extending the shearing length beyond the autocorrelation length of the surface to establish a relationship with rms roughness.
  • Analyzing the interference fringes in relation to surface topography.

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Main Results:

  • Demonstrated a close correlation between the shearing interference image characteristics and the surface's rms roughness.
  • Successfully measured the rms roughness of precision-finished surfaces in the 20-100 Angstrom range.
  • Validated the principle and theory of the proposed measurement method.

Conclusions:

  • The proposed method provides a stable and accurate approach for rms roughness measurement of smooth surfaces.
  • Shearing interference microscopy is a viable technique for high-precision surface metrology.
  • The relationship between extended shearing length and surface autocorrelation is key to the measurement's success.