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Updated: Jul 7, 2026

Microparticle Manipulation by Standing Surface Acoustic Waves with Dual-frequency Excitations
Published on: August 21, 2018
Simulation of surface acoustic wave motor with spherical slider
T Morita1, M K Kurosawa, T Higuchi
1Dept. of Precision Machinery Eng., Tokyo Univ.
This study developed a dynamic simulation model for spherical-slider surface acoustic wave (SAW) motors. The model clarifies the operational mechanism, revealing repeated levitation and contact, and analyzes motor speed dynamics.
Area of Science:
- Mechanical Engineering
- Materials Science
- Physics
Background:
- Surface Acoustic Wave (SAW) motors utilize spherical sliders, differing from conventional ultrasonic motors with flat sliders.
- Previous simulation models for ultrasonic motors require modification due to the unique spherical slider shape and high-frequency vibrations in SAW motors.
Purpose of the Study:
- To propose and validate a dynamic simulation model for SAW motors with spherical sliders.
- To investigate the operational mechanism, including levitation and contact dynamics.
- To analyze the transient response and performance characteristics of the SAW motor.
Main Methods:
- Development of a novel dynamic simulation model tailored for spherical-slider SAW motors.
- Simulation of motor operation to analyze levitation and contact conditions.
- Transient response simulation to study motor speed dynamics.
Main Results:
- The simulation model successfully clarified the operational mechanism, demonstrating repeated levitation and contact cycles.
- Transient response simulations provided insights into motor speed variations.
- Relationships between frictional factors, time constants, stator vibration velocity, and slider speed were established.
Conclusions:
- The proposed dynamic simulation model is effective for understanding SAW motor operation with spherical sliders.
- The study elucidated the interplay between levitation, contact, and motor performance.
- Further research on elastic deformation under preload is recommended for enhanced simulation accuracy.
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