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An integrated 16/spl times/16 PVDF pyroelectric sensor array.

T D Binnie1, H J Weller, Z He

  • 1Sch. of Eng., Napier Polytech. of Edinburgh, UK.

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
|February 2, 2008
PubMed
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This study introduces a novel pyroelectric sensor array using PVDF-on-silicon technology. The sensor features a low-noise charge amplifier and a self-absorbing structure, enhancing performance for thermal detection applications.

Area of Science:

  • Materials Science
  • Electrical Engineering
  • Sensor Technology

Background:

  • Pyroelectric sensors are crucial for thermal detection.
  • Integration challenges exist for high-performance pyroelectric sensor arrays.
  • Standard CMOS processes offer potential for miniaturization and cost reduction.

Purpose of the Study:

  • To present a fully integrated PVDF-on-silicon pyroelectric sensor array.
  • To demonstrate the benefits of a subpixel low-noise charge amplifier and a self-absorbing layered structure.
  • To assess the manufacturability and performance characteristics of the proposed sensor array.

Main Methods:

  • Fabrication of a three-layer pyroelectric sensor stack (conductive polymer, PVDF, metal reflector).
  • Integration of a low-noise charge amplifier using standard CMOS process technology.

Related Experiment Videos

  • Post-CMOS processing with five maskless steps compatible with standard CMOS fabrication.

    • Main Results:

    • Achieved an average pixel voltage sensitivity of 2200 V/W at 100 Hz.
    • Demonstrated a Noise-Equivalent Power (NEP) of 2.4 x 10^-11 W/√Hz at 100 Hz.
    • Obtained a specific detectivity of 4.4 x 10^8 cm√Hz/W at 100 Hz.

    Conclusions:

    • The integrated PVDF-on-silicon pyroelectric sensor array offers high performance.
    • The subpixel low-noise charge amplifier and self-absorbing structure are key innovations.
    • The sensor array is manufacturable using standard CMOS processes with minimal post-processing.