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Updated: Jul 7, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Holography-based wavefront sensing
F Ghebremichael1, Geoff P Andersen, Kenneth S Gurley
1Lockheed Martin Corp., Space Systems Co., O'ABDS B/201, 3251 Hanover Street, Palo Alto, California 94304, USA. fassil.ghebremichael@lmco.com
Abstract:
We describe a modal wavefront sensing technique of using multiplexed holographic optical elements (HOEs). The phase pattern of a set of aberrations is angle multiplexed in a HOE, and the correlated information is obtained with a position sensing detector. The recorded aberration pattern is based on an orthogonal basis set, the Zernike polynomials, and a spherical reference wave. We show that only two recorded holographic patterns for any particular aberration type are sufficient to allow interpolated readout of aberrations to lambda/50. In this paper, we demonstrate the capability of detecting errors between +/-2lambda PV for each orthogonal set at rates limited only by the speeds of the detection electronics, which could be up to 1 MHz. We show how we take advantage of the unavoidable intermodal and intramodal cross talks in determining the type, amplitude, and orientation of the wavefront aberrations.

