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Updated: Jul 7, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
F Ghebremichael1, Geoff P Andersen, Kenneth S Gurley
1Lockheed Martin Corp., Space Systems Co., O'ABDS B/201, 3251 Hanover Street, Palo Alto, California 94304, USA. fassil.ghebremichael@lmco.com
This study introduces a new wavefront sensing method using multiplexed holographic optical elements (HOEs). This technique accurately measures aberrations with high precision, enabling faster and more reliable optical system analysis.
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