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Electron Channeling Contrast Imaging for Rapid III-V Heteroepitaxial Characterization
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Electron Channeling Contrast Imaging for Rapid III-V Heteroepitaxial Characterization

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Modified channeled spectrum for fast measurement of thin films

G Dyankov1

  • 1Industrial Technology Research Institute, Center for Measurement Standards, Building 12, Section 2, Kuang Fu Road 321, Hsinchu 300, Taiwan. dyankov@itri.org.tw

Applied Optics
|February 2, 2008
PubMed

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