SAW device modeling including velocity dispersion based on ZnO/diamond/Si layered structures

Area of Science:

• Materials Science
• Electrical Engineering
• Acoustics

Background:

• Conventional Surface Acoustic Wave (SAW) device modeling is established for bulk substrates.
• Layered materials, such as ZnO/diamond/Si, exhibit unique SAW velocity dispersion characteristics.
• Existing models may not accurately capture the performance of SAW devices on layered structures.

Purpose of the Study:

• To calculate Surface Acoustic Wave (SAW) filter properties for ZnO/diamond/Si structures, incorporating velocity dispersion.
• To investigate the impact of velocity dispersion on the null frequency bandwidth of layered SAW devices.
• To develop and validate advanced modeling techniques for layered SAW structures.

Main Methods:

• Calculation of SAW filter properties for ZnO/diamond/Si structures, including velocity dispersion.
• Application of the delta function model and equivalent circuit model, incorporating velocity dispersion.
• Development and presentation of a dispersive equivalent circuit (DEC) model for layered structures.
• Comparison of model predictions with experimental results.

Main Results:

• Layered structures exhibit SAW velocity dispersion, affecting filter bandwidth.
• The null frequency bandwidth of layered ZnO/diamond/Si structures is narrower than predicted by conventional models.
• The delta function model and equivalent circuit model, including dispersion, accurately predict bandwidth.
• The proposed DEC model shows very good agreement with experimental results.

Conclusions:

• Accurate modeling of SAW devices on layered substrates requires accounting for velocity dispersion.
• The developed dispersive equivalent circuit (DEC) model provides a reliable method for analyzing layered SAW structures.
• The findings enhance the understanding and design of SAW filters for advanced applications.