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Surface micromachined capacitive ultrasonic transducers.

I Ladabaum1, X Jin, H T Soh

  • 1Edward L. Ginzton Lab., Stanford Univ., CA.

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
|February 5, 2008
PubMed
Summary

Novel microfabricated ultrasonic transducers show promise for both air and water applications. These devices offer a viable alternative to traditional piezoelectric transducers, demonstrating significant dynamic range and signal-to-noise ratio.

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Area of Science:

  • Materials Science
  • Acoustics
  • Engineering

Background:

  • Surface microfabrication techniques have advanced.
  • Ultrasonic transducers are crucial for various sensing and imaging applications.
  • Existing piezoelectric transducers have limitations in certain environments.

Purpose of the Study:

  • To report on the current state of surface microfabricated ultrasonic transducer technology.
  • To demonstrate the performance of these transducers in air and water.
  • To compare their potential against piezoelectric transducers.

Main Methods:

  • Experimental testing of microfabricated ultrasonic transducers for air and water transmission.
  • Measurement of dynamic range in air-coupled longitudinal wave transmission through aluminum.

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  • Evaluation of signal-to-noise ratio (SNR) in water transmission experiments.
  • Development and validation of a theoretical model for transducer behavior.

    • Main Results:

    • Demonstrated air-coupled longitudinal wave transmission through aluminum with a 110 dB dynamic range at 2.3 MHz.
    • Achieved a 60 dB SNR at 3 MHz during water transmission experiments (1-20 MHz).
    • A theoretical model accurately predicted observed transducer performance.

    Conclusions:

    • Microfabricated ultrasonic transducers exhibit excellent performance in both air and water.
    • These transducers present a compelling alternative to conventional piezoelectric transducers.
    • The developed theoretical model supports the viability of this novel technology.