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Inductively coupled surface acoustic wave device for sensor application.

K Beck1, R Wohlfahrt, A Rugemer

  • 1Inst. fur Angewandte Phys., Heidelberg Univ, Germany.

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
|February 5, 2008
PubMed
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This study introduces a novel surface acoustic wave (SAW) device eliminating bonding wires for enhanced sensor applications. The new inductively coupled SAW sensors demonstrate excellent temperature resistance and a low detection limit for nitrogen dioxide (NO2).

Area of Science:

  • Materials Science
  • Electrical Engineering
  • Chemical Sensing

Background:

  • Traditional surface acoustic wave (SAW) devices often require bonding wires, limiting their application in harsh environments.
  • Inductive coupling offers a potential solution to eliminate bonding wires in SAW sensor systems.

Purpose of the Study:

  • To present a novel SAW device design that eliminates the need for bonding wires through inductive coupling.
  • To investigate the theoretical and experimental impedance characteristics and matching requirements of these devices.
  • To evaluate the performance of these devices in sensor applications, specifically for nitrogen dioxide (NO2) detection.

Main Methods:

  • Theoretical and experimental investigation of device impedance and RF matching.
  • Operation of SAW devices at elevated temperatures up to 400°C.

Related Experiment Videos

  • Coating of 363 MHz SAW devices with copper phthalocyanine for NO2 sensing.

    • Main Results:

    • Successful elimination of bonding wires via inductive coupling to RF circuitry.
    • Demonstrated good temperature resistance with reliable operation up to 400°C.
    • Achieved a detection limit below 1 part per billion (ppb) for NO2 using copper phthalocyanine-coated devices.

    Conclusions:

    • The developed inductively coupled SAW device is suitable for high-temperature sensor applications.
    • This technology offers a robust and sensitive platform for gas detection, exemplified by NO2 sensing.
    • The elimination of bonding wires enhances the practicality and reliability of SAW sensors.