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Updated: Jul 7, 2026

Fabrication and Characterization of Thickness Mode Piezoelectric Devices for Atomization and Acoustofluidics
Published on: August 5, 2020
Mass sensitivity of acoustic plate mode in liquids
F Teston1, G Feuillard, L Tessier
1GIP Ultrasons/Lussi, 2bis Boulevard Tonnellé, BP 3223, 37032 Tours, Cedex, France. teston@univ-tours.fr
Abstract:
In this paper, the concept of electrical effective permittivity function is used to calculate the eigen-frequencies and the particle displacements of piezoelectric acoustic plate modes (APM). These results allowed us to determine the mass sensitivities of the first order vibration modes using a first order perturbation theory. Theoretical results are discussed and compared to those of a variational method and isotropic two-layer composite analysis in the case of a shear horizontal APM sensor on a singly rotated cut quartz substrate. Experimental measurements by a copper electrodeposition are carried out and show that the perturbation method leads to a better understanding of the APM behavior.
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