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Updated: Jul 7, 2026

Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators
Published on: August 8, 2025
Sensitivity and optimization of a high-Q sapphire dielectric motion-sensing transducer
B D Cuthbertson1, M E Tobar, E N Ivanov
1Department of Physics, University of Western Australia, Nedlands 6907, Western Australia, Australia.
Abstract:
A high-Q sapphire dielectric motion sensing transducer that operates at microwave frequencies has been developed. The device uses cylindrical whispering gallery modes of quality factor greater than 10 (5) at room temperature and greater than 10(8) at 4 K. The tuning coefficient of the transducer resonance frequency with respect to displacement was measured to be of the order of a few MHz/microm. An electromagnetic model that predicts the resonant frequency and tuning coefficient has been developed and was verified by experiment. We implemented the model to determine what aspect ratio and what dielectric mode is necessary to maximize the sensitivity. We found that the optimum mode type was a TM whispering gallery mode with azimuthal mode number of about 7 for a resonator of 3 cm in diameter. Also, we determined that the tuning coefficients were maximized by choosing an aspect ratio that has a large diameter with respect to the height. By implementing a microwave pump oscillator of SSB phase noise -125 dBc/Hz at 1 kHz; offset, we have measured a sensitivity of order 10 (-16) m/ radicalHz. We show that this can be improved with existing technology to 10(-18) m/ radicalHz, and that in the near future this may be further improved to 10(-19) m/ radicalHz.
