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Related Experiment Video

Updated: Jul 7, 2026

Fabrication and Testing of Microfluidic Optomechanical Oscillators
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Fabrication and Testing of Microfluidic Optomechanical Oscillators

Published on: May 29, 2014

Acoustic wave-based sensors using mode conversion in periodic gratings.

F Bender1, R Dahint, F Josse

  • 1Angewandte Phys. Chem., Heidelberg Univ.

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
|February 5, 2008
PubMed
Summary

This study introduces novel grating-based surface acoustic wave (SAW) sensors. These sensors detect chemicals on an electrode-free surface, minimizing interference and improving durability for accurate gas detection.

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Area of Science:

  • Acoustic wave physics
  • Chemical sensing technology
  • Materials science

Background:

  • Surface acoustic waves (SAW) are efficiently converted to bulk waves using periodic gratings.
  • Grating structures on opposite piezoelectric plate surfaces enable directed SAW propagation.
  • Existing SAW sensors face challenges with spurious responses and electrode degradation due to analyte contact.

Purpose of the Study:

  • To design and explain grating-based SAW sensors for chemical analyte detection.
  • To investigate the mass sensitivity of these sensors using polymer films.
  • To demonstrate the sensor's capability for detecting nitrogen dioxide (NO(2)) at low concentrations.

Main Methods:

  • Fabrication of periodic gratings on piezoelectric plates.

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Characterization of Anisotropic Leaky Mode Modulators for Holovideo
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Characterization of Anisotropic Leaky Mode Modulators for Holovideo

Published on: March 19, 2016

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Last Updated: Jul 7, 2026

Fabrication and Testing of Microfluidic Optomechanical Oscillators
09:10

Fabrication and Testing of Microfluidic Optomechanical Oscillators

Published on: May 29, 2014

Characterization of Anisotropic Leaky Mode Modulators for Holovideo
09:36

Characterization of Anisotropic Leaky Mode Modulators for Holovideo

Published on: March 19, 2016

  • Utilizing grating structures to direct SAW propagation between opposite surfaces.
  • Investigating mass sensitivity with chemical vapor deposited thin polymer films.
  • Experimental detection of nitrogen dioxide (NO(2)) in sub-ppm concentrations.
  • Main Results:

    • Demonstrated efficient conversion between SAW and bulk waves using gratings.
    • Achieved directed SAW propagation between opposite surfaces of a piezoelectric plate.
    • Successfully detected nitrogen dioxide (NO(2)) at sub-ppm levels.
    • Minimized spurious sensor responses and electrode aging by using an electrode-free detection surface.

    Conclusions:

    • Grating-based SAW sensors offer a robust platform for chemical detection.
    • The electrode-free detection surface enhances sensor reliability and longevity.
    • These sensors show promise for sensitive and selective gas detection applications.